Video Microscope Unit VMU Series Specifications Magnification of tube 1X Reflected illumination - Telecentric system with aperture stop system - Fibre-optic illuminator (optional) is required Light source Halogen bulb (21V, 150W) (optional) Objective lenses for bright field observation (Optional accessory) M Plan Apo, M Plan Apo SL, G Plan Apo Objective lenses for laser cutting (Optional accessory) M plan Apo NIR, LCD Plan Apo NIR, M Plan Apo NUV and LCD Plan Apo NUV Objective lenses for laser machining (Optional accessory) M Plan UV (for 378-514 only) Refer to the microscope units and objective lenses brochure VMU The VMU is a compact, lightweight and easy-to-install microscope unit for CCD camera monitoring in semiconductor fabrication facilities. The VMU offers you the following benefits: • The optical system features ultra-long working distance objectives and correction for the wide range of radiation wavelengths in use. • Reflected illumination keeps your workpiece free from thermal expansion (the fibreoptic illuminator is required.) • Also available with a laser mount or turret (objective mount). • The objective is optional. VMU-V 378-505 VMU-H 378-506 VMU-LB 378-513 VMU-L4B 378-514 Selection Guide to System Configuration (Depends on each system configuration) No. Applicable Wavelength Vertical camera C-mount Horizontal camera Cmount YAG laser mount Fibre optic illumination unit mount Mass [g] 378-505 Near-infrared and visible radiation Yes Yes 570 378-506 Near-infrared and visible radiation Yes Yes 590 378-513 Near-infrared, visible, near-ultraviolet radiation Yes Yes Yes 1300 378-514 Near infrared, visible, near ultraviolet and ultraviolet radiation Yes Yes Yes 1300 All products to be sold to commercial customers. Product illustrations are without obligation. Product descriptions, in particular any and all technical specifications, are only binding when explicitly agreed upon. 419
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